Oxidation of a Silicon Nitride-Titanium Nitride Composite: Microstructural Investigations and Phenomenological Modeling
نویسندگان
چکیده
منابع مشابه
Interface Investigations on Titanium Nitride Bilayer Systems
Nanocomposite coatings composed of two phases with atomically sharp phase boundaries, show interesting mechanical properties. These properties are often originating from their high interface to volume ratio. Composites of nanocrystalline titanium nitride (TiN) grains surrounded by a one to two monolayer thick interlayer of silicon nitride (Si3N4) show an enhanced nanohardness. The central theme...
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plasma-sprayed silicon layers have been used to produce silicon nitride layers with fibrous microstructure which optimizes fracture toughness and strength. SEM examination of the specimens shows that the surface is covered by fine needles and whiskers of Si3N4.In order to study the oxygen contamination effect as well as other contaminants introduced during spraying and nitridation processes, su...
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In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...
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The co-ammonolysis of V(NMe2)4 and Si(NHMe)4 with ammonia in THF and in the presence of ammonium triflate ([NH4][CF3SO3]) leads to the formation of monolithic gels. Pyrolysing these gels produces mesoporous composite materials containing nanocrystalline VN and amorphous silicon imidonitride. Elemental mapping indicated a thorough distribution of VN with no evidence of large cluster segregation....
متن کاملLocal electric-field-induced oxidation of titanium nitride films
Nanometer-scale patterning of TiN films grown on SiO2 /Si(001) has been demonstrated using the local electric-field-induced oxidation process with a conductive-probe atomic force microscope. The chemical composition of the modified TiN region was determined by micro-Auger electron spectroscopy and was found to consist of Ti, some trace amount of N, and O, suggesting the formation of titanium ox...
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ژورنال
عنوان ژورنال: Journal of the American Ceramic Society
سال: 2004
ISSN: 0002-7820,1551-2916
DOI: 10.1111/j.1151-2916.2002.tb00365.x